北方华创：HARP是基于臭氧-TEOS体系的热CVD工艺

证券之星09-24 15:39

证券之星消息，北方华创(002371)09月24日在投资者关系平台上答复投资者关心的问题。

投资者提问：请问公司，在先进制程领域里，HARP工艺比传统TEOS工艺的优势在哪？HARP工艺里，O3发生器是否为核心系统之一？

北方华创回复：您好！HARP是基于臭氧-TEOS体系的热CVD工艺，采用无等离子体热反应机制，在高深宽比结构的间隙填充与保形覆盖方面表现优异，适用于特定介质填充场景。臭氧作为关键反应气源由配套发生器提供，整机工艺能力依赖多模块协同实现，并非由单一部件决定。感谢关注！

本文数据来源于深圳证券交易所互动易，仅供参考不构成投资建议。

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责任编辑：沈彬

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