芯片材料国产化重大突破！高纯石英首次打入DRAM大厂：用于300mm晶圆

快科技官方09-11

快科技9月11日消息，据报道，江苏太平洋石英股份有限公司的炉管系列产品，已通过国内一家头部DRAM制造商的认证，可用于300毫米晶圆生产。太平洋石英此次认证的意义在于，这是国产高纯石英首次进入晶圆制造的核心工艺环节。此前，其产品已向泛林集团、东京电子等国际半导体设备巨头批量供应，包括LPCVD扩散管、晶舟、石英锭等，纯度达4N5至5N级。此次通过DRAM厂商认证，标志着从石英砂提纯、炉管加工到供应...

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