阿斯麦称High NA EUV首次进入高产量逻辑芯片生产

智通财经09-01

【阿斯麦称High NA EUV首次进入高产量逻辑芯片生产】阿斯麦9月1日透露，其High NA EUV平台首次用于高产量逻辑芯片产品，标志着0.55 NA光刻技术从认证阶段迈向生产应用。

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