公司问答丨联合化学：米莱芯程上月交付产品为i-line照明系统及物镜系统相关产品适配成熟制程光刻工艺设备

格隆汇08-10

有投资者在互动平台向联合化学提问，米莱芯程上个月底发岀的设备可以用在国产DUV光刻机吗？联合化学回复称，米莱芯程上月交付产品为i-line照明系统及物镜系统，i-line属于365nm波长紫外谱线(UV)，相关产品适配成熟制程光刻工艺设备，应用场景覆盖集成电路制造、先进封装、光伏面板生产等领域。

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公司问答丨联合化学：米莱芯程上月交付产品为i-line照明系统及物镜系统 相关产品适配成熟制程光刻工艺设备

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公司问答丨联合化学：米莱芯程上月交付产品为i-line照明系统及物镜系统相关产品适配成熟制程光刻工艺设备