半导体设备零部件迎来重大突破！CMTX单晶硅接地环原型生产

快科技07-20 16:33

快科技7月20日消息，韩国半导体零部件厂商CMTX成为首家直接为半导体工厂提供超大单晶硅零部件的售后供应商，完成直径约590mm单晶硅接地环的原型生产。

CMTX是一家专注于半导体设备零部件的厂商，通过子公司CELIC开发大直径单晶硅材料，建立了从材料生产、晶锭生长到加工、蚀刻、清洗的垂直整合制造体系。

接地环是半导体蚀刻腔体中围绕上电极的最外层环形组件，负责稳定上电极电气状态、消散静电、控制等离子体分布，对维持晶圆良率至关重要。

传统接地环使用多晶硅制造，但多晶硅晶粒方向不同，蚀刻不均匀，表面粗糙、颗粒生成多，而单晶硅晶体结构均匀，蚀刻特性一致，能提高良率、减少颗粒。

CMTX已完成原型生产，计划开始客户认证，量产时间尚未确定，将从接地环开始，逐步扩展到其他超大半导体零部件。

单晶硅零部件未来会不会全面替代多晶硅？你觉得CMTX能在这个市场站稳脚跟吗？

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