芯碁微装国内首款510mm×515mm PLP直写光刻设备获重要客户订单

IT之家07-06

IT之家 7 月 6 日消息，微纳直写光刻设备企业芯碁微装 (CFMEE) 本月 3 日宣布，其自主研发的国内首款 510mm × 515mm 板级封装 (PLP) 直写光刻设备 PLP 2000 成功获得先进封装领域重要客户订单。

IT之家了解到，芯碁微装的 PLP 2000 机台专为大尺寸板级封装应用场景开发，最大可支持 600mm × 600mm 加工尺寸，能够满足 CoPoS、玻璃基板、FOPLP 等先进封装工艺对2μm 量产解析能力的要求。

该装备在大幅面曝光、图形解析、面板均匀性、整板一致性等方面进行系统化设计，可有效保障大尺寸基板加工过程中的工艺稳定性。

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