韩媒the bell当地时间26日报道称三星电子正重新加速1.4nm(SF1.4)工艺节点的研发工作。该先进制程一度计划

智通财经06-30 10:39

韩媒the bell当地时间26日报道称三星电子正重新加速1.4nm(SF1.4)工艺节点的研发工作。该先进制程一度计划2027年量产但由于晶圆代工业务重心调整量产时间推迟至2029年。报道指出三星电子近期向应用材料、泛林研究等主要半导体设备企业分享了 SF1.4 工艺方案希望实现上下游协力加速打造最适合该节点的设备组合包括标准设备的定制化版本。三星电子已从ASML引进了 High NA EUV 光刻图案化设备这一机台部署在NRD-K半导体研发综合体中。对于三星电子而言High NA EUV 光刻机预计最早在 SF1.4节点用于生产。

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