比利时半导体研究机构获阿斯麦High NA EUV设备，助攻产业发展

格隆汇03-19

比利时半导体研究机构IMEC表示，已取得一台阿斯麦High NA极紫外光(EUV)微影设备，价值约4亿美元。这款设备全球仅有不到十台，被视为下一代芯片制造的重要关键设备，将协助产业推进更先进制程技术的研发与测试。IMEC指出，这台High NA EUV设备将成为其NanoIC试产线的核心设备。该试产线总投资规模达25亿欧元，其中约14亿欧元来自公共资金，包括欧盟《芯片法》提供的支持。IMEC长期...

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