至纯科技：半导体湿法设备在28纳米节点可全工序段覆盖

证券日报 01-13

证券日报网1月13日讯，至纯科技（维权）在接受调研者提问时表示，公司半导体湿法设备在28纳米节点可全工序段覆盖，且全工艺机台均有订单，在更先进制程节点也已取得部分工艺订单，尤其在高温硫酸、FINETCH、单片磷酸等尚被国际厂商垄断的机台，公司交付和验证进度都在国内领先。重点攻坚更先进制程需求。公司投入巨资研发全系列产品，包括高难度的单片硫酸，单片磷酸等设备，旨在为客户提供一站式解决方案。同时，...

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