台积电与国立成功大学团队联合研发低温金刚石薄膜提升半导体散热

磨料磨具2025-12-24

随着高性能计算、高功率电子器件和先进封装技术的快速发展，芯片散热已成为制约系统性能与可靠性的关键瓶颈。金刚石因其极高的热导率和优异的介电强度，被认为是下一代集成电路和封装领域极具潜力的散热材料。在后端工艺（BEOL）制造中，材料沉积温度通常需要控制在 450 °C 及以下，以避免对既有金属互连结构和器件性能造成损伤。然而，在如此低的温度条件下制备兼具连续性、低缺陷密度与高热导率的金刚石薄膜，一直是...

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GLOBAL EMERGING MARKET EQUITIES\"DU\" (USD) ACC","IE00BQXX3D17.EUR":"GUINNESS GLOBAL INNOVATORS \"C\" (EUR) ACC","LU2211815571.USD":"ALLIANZ POSITIVE CHANGE \"AT\" (USD) ACC","LU1712237335.SGD":"Natixis Mirova Global Sustainable Equity H-R-NPF/A SGD"},"translate_title":"TSMC and National Cheng Kung University team jointly develop low-temperature diamond film to improve semiconductor heat dissipation","themeId":null,"isJumpTheme":false,"ttsUrl":null,"symbols_score_info":{"SOXX":0.6,"TSM":1.86,"03145":0.6,"SMH":0.6},"content_text":"随着高性能计算、高功率电子器件和先进封装技术的快速发展，芯片散热已成为制约系统性能与可靠性的关键瓶颈。金刚石因其极高的热导率和优异的介电强度，被认为是下一代集成电路和封装领域极具潜力的散热材料。在后端工艺（BEOL）制造中，材料沉积温度通常需要控制在 450 °C 及以下，以避免对既有金属互连结构和器件性能造成损伤。然而，在如此低的温度条件下制备兼具连续性、低缺陷密度与高热导率的金刚石薄膜，一直是产业和学术界面临的难题。近日，国立成功大学微电子研究所的曾永华教授团队与台积电等的研究人员合作，提出了一种适用于低温（450 ℃）的微波等离子体化学气相沉积（MPCVD）金刚石薄膜制备技术，其热导率可达到300 W/m·K以上。该研究成果题为“MPCVD diamond thin films as heat spreaders for back end of the line (BEOL) silicon chip fabrication”，并已发表于《Diamond & Related Materials》。针对低温条件下金刚石薄膜制备中晶粒尺寸小、晶界密集导致热导率下降的问题，研究团队通过引入均匀分布的3 nm金刚石晶种，在硅衬底上成功构建了连续且致密的金刚石薄膜。实验表明，适量的石墨浆添加能够促进金刚石种子晶粒的生长，并防止种子在等离子体中被刻蚀，从而提高了薄膜的质量和热导率。在工艺优化方面，研究团队通过控制石墨浆的添加量，调节了金刚石薄膜的厚度和晶粒尺寸。实验结果显示，在初步生长阶段加入少量石墨浆，可以显著提升金刚石晶粒的快速生长，使得薄膜达到50–100 nm的均匀厚度，并保持较高的热导率（约300 W/m·K）。随着生长时间的延长，金刚石薄膜的晶粒尺寸进一步增大，热导率也随之提升。热性能测试采用了时间域热反射（TDTR）方法，结果显示，金刚石薄膜的热导率随着晶粒尺寸的增大而提高，最终达到200–300 nm的厚度，且热导率可维持在300 W/m·K左右。与传统低温金刚石薄膜相比，研究团队的技术在低温下成功提升了薄膜的热导能力。该技术不仅满足了BEOL工艺的低温要求，而且提供了一种高效的金刚石薄膜制备方案，具有广阔的应用前景。对于高性能计算、3D集成电路及高功率半导体器件的热管理，金刚石薄膜作为理想的散热材料，将为未来的半导体产业提供强有力的技术支持。图文导读图1. 示意图展示三种不同的金刚石晶核：（a）尺寸相同、均匀且致密的金刚石晶体；（b）低密度、不同尺寸的金刚石晶核簇；（c）具有高密度缺陷的金刚石晶核，该缺陷可诱导二次成核。图2. 由不同尺寸和形状的钻石晶粒构成的多晶金刚石薄膜：（a）大型立方钻石晶粒组装形成的钻石薄膜；（b）柱状钻石晶粒，其垂直于基板表面的长度大于单个钻石晶粒的横向直径；（c）倒金字塔形钻石晶粒，晶粒间填充由较小钻石晶粒构成的填充物。图3. 本研究用于测量金刚石薄膜热导率的TDTR系统示意图。","kind":"news","is_publish_news":true,"is_publish_highlight":false,"is_publish_live":false,"is_publish_wemedia":null,"editions":null,"column":"","sentiment":"1","news_tag":"","news_rank":0,"symbols":[],"gpt_button":0,"need_auth":false,"code":"91000000","status":"200"},"commentList":[],"isCommentEnd":true,"newsSizeData":{"likeSize":0,"commentSize":0,"repostSize":0,"favoriteSize":0,"likeStatus":false,"favoriteStatus":false},"APP":{"userAgent":"Mozilla/5.0 AppleWebKit/537.36 (KHTML, like Gecko; compatible; ClaudeBot/1.0; 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