EUV缺席，HBM难题何解？中国存储的“工艺极限”突围

中华网2025-12-21

在AI算力基础设施中，如果说AI芯片是吞吐数据的“超级工厂”，那么HBM(高带宽存储)就是必备的“高速物流枢纽”。决定 “超级工厂”生产效率的，往往不是机器转得有多快，而是物流枢纽能不能即时送来原材料。在摩尔定律放缓的今天，逻辑芯片的算力增长与其数据获取速度之间形成了巨大的剪刀差，计算单元常常因为等不到数据而被迫“怠工”。HBM正是为了解决这一痛点而生，它通过精密的垂直堆叠技术，建立了一套立体化的...

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China's storage \"process limit\" breakthrough","themeId":null,"isJumpTheme":false,"ttsUrl":null,"symbols_score_info":{"MU":0.9},"content_text":"在AI算力基础设施中，如果说AI芯片是吞吐数据的“超级工厂”，那么HBM(高带宽存储)就是必备的“高速物流枢纽”。决定 “超级工厂”生产效率的，往往不是机器转得有多快，而是物流枢纽能不能即时送来原材料。在摩尔定律放缓的今天，逻辑芯片的算力增长与其数据获取速度之间形成了巨大的剪刀差，计算单元常常因为等不到数据而被迫“怠工”。HBM正是为了解决这一痛点而生，它通过精密的垂直堆叠技术，建立了一套立体化的物流体系，确保数据能以惊人的速度直达计算核心。然而HBM这一高端竞技场，只有掌握DRAM供应能力的企业手握入场券。HBM的本质：DRAM堆叠HBM的核心组件是DRAM裸片。制造HBM，本质上是以极致精密的先进封装将DRAM立体化以实现“存算一体”能力的释放。这决定了其制造工艺必须基于DRAM特有的1T1C(一晶体管一电容)架构，需要在微观尺度上进行原子级的“雕刻”与电荷控制。在当下存储芯片一片难求的紧缺态势下，这种工艺基因也决定了只有掌握DRAM供应端的企业才具备进行HBM制造的基础条件。另一种存储芯片NAND厂商擅长的是芯片堆叠，与DRAM所需的微观精密制造能力截然不同，切入HBM的难度极大。因此，在全球范围内，HBM的入场券牢牢掌握在少数拥有DRAM核心设计与制造能力的IDM(垂直整合制造)巨头手中。新技术：探索无EUV下的新可能随着DRAM制程微缩，三星、美光、海力士等国际巨头采用EUV光刻机来推进先进制程。但是由于美国管制原因，中国企业无法进口EUV光刻机，也为进军HBM构成客观挑战。然而新技术路径提供了无EUV下制造下先进DRAM与HBM的新可能。SAQP(自对准四重曝光)这项技术通过多次曝光和刻蚀，利用现有的DUV设备实现超越物理极限的微缩精度。虽然这增加了工艺步骤的复杂度和成本，但它从物理上验证了“无EUV制造先进DRAM”的可行性。这种“以工艺换制程”的工程能力，有望使中国企业在极限施压下，探索HBM新的技术底座。HBM自主权：产业的必然选择随着国际AI算力竞争的白热化，HBM这一核心技术才是真正考验产业未来高度的关键。无论从算力基建还是从AI科技发展的角度，掌握HBM自主权都是国内产业的唯一选择权，而DRAM企业是唯一可能突破HBM赛道的企业。目前，国内唯一实现DRAM大规模量产的长鑫已进入IPO阶段，预计随着未来招股书的披露，有望更清晰地看到在国产化上的真实进展。尽管当前面临着无EUV光刻机等客观挑战，但SAQP等创新工艺的加持下，国产厂商有望走出新路径，以跨越设备封锁鸿沟，进军先进产品领域。","kind":"news","is_publish_news":true,"is_publish_highlight":false,"is_publish_live":false,"is_publish_wemedia":null,"editions":null,"column":"","sentiment":"0","news_tag":"","news_rank":0,"symbols":[],"gpt_button":0,"need_auth":false,"code":"91000000","status":"200"},"commentList":[],"isCommentEnd":true,"newsSizeData":{"likeSize":0,"commentSize":0,"repostSize":0,"favoriteSize":0,"likeStatus":false,"favoriteStatus":false},"APP":{"userAgent":"Mozilla/5.0 AppleWebKit/537.36 (KHTML, like Gecko; compatible; ClaudeBot/1.0; +claudebot@anthropic.com)","isDev":false,"isTTM":false,"tenantId":"TBCN","deviceId":"web-server-community-laohu8-v3","version":"4.36.2","shortVersion":"4.36.2","platform":"web","vendor":"web","appName":"laohu8","isIOS":false,"isAndroid":false,"isTiger":false,"isTHS":false,"isWeiXin":false,"isWeiXinMini":false,"isWeiBo":false,"isQQ":false,"isBaiduSwan":false,"isBaiduBox":false,"isDingTalk":false,"isToutiao":false,"isOnePlus":false,"isHuaWei":false,"isXiaomi":false,"isXiaomiWebView":false,"isOppo":false,"isVivo":false,"isSamsung":false,"isMobile":false},"href":"/m/news/2593355127","isCrawlerRequest":true}