国产高端光刻机再突破：上海芯上微装首台350nm步进光刻机发运

市场资讯2025-11-26

炒股就看金麒麟分析师研报，权威，专业，及时，全面，助您挖掘潜力主题机会！（来源：IT之家）IT之家 11 月 26 日消息，上海芯上微装科技股份有限公司（AMIES）昨日宣布：公司自主研发的首台 350nm 步进光刻机（AST6200）正式完成出厂调试与验收，启程发往客户现场。芯上微装表示，这标志着我国在高端半导体光刻设备领域再次实现关键突破！这不仅是一次产品的交付，更是国产半导体装备向高端化、...

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