ASML展示首款先进封装大视场光刻机

格隆汇11-07

据科创板日报，在第八届进博会上，半导体设备供应商ASML展示其部分全景光刻产品与技术。其中，DUV光刻机包括TWINSCAN XT:260、TWINSCAN NXT:870B。TWINSCAN XT:260这款i-line光刻机是ASML首款可服务于先进封装领域的光刻系统，具有大视场曝光，相较于现有机型可提高4倍生产效率；TWINSCAN NXT:870B在升级的光学器件和最新一代磁悬浮平台的支持...

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