微导纳米(688147.SH)：开发的国内首台成功应用于集成电路制造前道生产线的量产型High-k ALD设备

中金财经09-26

格隆汇9月26日丨微导纳米(688147.SH)在互动平台表示，公司是国内领先的ALD设备供应商，相关产品涵盖了行业所需主流ALD薄膜材料及工艺。ALD技术在45nm以下节点以及3D结构等先进半导体薄膜沉积环节具有良好的应用前景，是半导体设备中增长最快的领域之一。公司开发的国内首台成功应用于集成电路制造前道生产线的量产型High-k ALD设备，解决了国内集成电路突破28nm制程节点最核心工艺之一...

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