芯上微装第500台步进光刻机成功交付

芯智讯08-08

2025年8月8日，上海芯上微装科技股份有限公司（英文简称：AMIES）举办了第500台步进光刻机交付仪式，充分展现了AMIES作为国产步进光刻机领军企业的自主创新实力，标志着我国高端半导体装备产业迈上新的台阶。相关政府部门、战略客户、股东代表、行业协会、合作高校等领导共同出席了交付仪式。先进封装光刻机是AMIES的拳头产品，具备高分辨率、高套刻精度、超大曝光视场等显著特点，具有强大的翘曲和厚胶...

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