晶合集成获得实用新型专利授权：“一种晶圆清洗装置”

证券之星企业动态2025-07-26

证券之星消息，根据天眼查APP数据显示晶合集成（688249）新获得一项实用新型专利授权，专利名为“一种晶圆清洗装置”，专利申请号为CN202422137738.4，授权日为2025年7月11日。专利摘要：本实用新型公开了一种晶圆清洗装置，属于半导体技术领域，所述晶圆清洗装置至少包括：第一承载臂；多个导出管，间隔设置在所述第一承载臂上，多个所述导出管各自与所述第一承载臂固定连接，且所述导出管的出口...

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