深圳市捷佳伟创新能源装备股份有限公司石墨舟支撑结构及PECVD镀膜设备专利获授权（半导体设备专利快讯）

DoNews2025-07-23

天眼查App显示，2025年7月22日，深圳市捷佳伟创新能源装备股份有限公司研发的“石墨舟支撑结构及PECVD镀膜设备”专利正式进入专利权授权阶段。申请人为深圳市捷佳伟创新能源装备股份有限公司，该项半导体设备专利涉及石墨舟在镀膜设备中的支撑与防转动技术。据专利信息显示，该方案通过第一槽体与第一凸起的配合结构实现防转动功能，显著优化了石墨舟支撑结构的安装与拆卸维护效率。发明人为李学文、刘兵吉、肖岳南...

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