联合化学：投影式曝光机是半导体光刻工艺中的核心设备之一

互动易2025-07-18

有投资者向联合化学提问，请问投影式曝光机是投影式光刻机的一类吗.工作原理是否类似?公司回答表示，尊敬的投资者您好，卓光芮主要开展投影式曝光机的研发，投影式曝光机是半导体光刻工艺中的核心设备之一，主要用于将掩模版（光罩）上的精细电路图形，通过光学投影的方式，精确地缩小并曝光转移到涂有光刻胶的硅片（晶圆）表面，感谢您的关注！

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