至纯科技获得实用新型专利授权：“一种清洗槽用晶圆承载装置”

证券之星企业动态2025-07-12

证券之星消息，根据天眼查APP数据显示至纯科技（603690）新获得一项实用新型专利授权，专利名为“一种清洗槽用晶圆承载装置”，专利申请号为CN202421682699.X，授权日为2025年6月27日。专利摘要：本实用新型提供一种清洗槽用晶圆承载装置，晶圆接触组件，分别与第一纵向支撑板的下端和第二纵向支撑板的下端可拆卸连接，用于承载晶圆置于清洗设备的清洗槽内；晶圆接触组件包括第一V型齿条、第二V...

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