拓荆科技获得发明专利授权：“晶圆承载组件、晶圆传递装置及晶圆传递之方法”

证券之星企业动态2025-07-12

证券之星消息，根据天眼查APP数据显示拓荆科技（688072）新获得一项发明专利授权，专利名为“晶圆承载组件、晶圆传递装置及晶圆传递之方法”，专利申请号为CN202010587218.7，授权日为2025年7月11日。专利摘要：本发明揭露一种用于反应腔中的晶圆承载组件，其包含：一加热板，固接有用于站立在反应腔底部的复数个支撑脚；一顶针托盘，垂直升降于该加热板下方，且固接有垂直升降于该加热板上方的...

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