ASML申请具有低串扰的多带电粒子射束设备专利，增强成像分辨率

金融界2025-06-28

金融界2025年6月28日消息，国家知识产权局信息显示，ASML荷兰有限公司申请一项名为“具有低串扰的多带电粒子射束设备”的专利，公开号CN120221358A，申请日期为2020年05月。专利摘要显示，本公开涉及一种具有低串扰的多带电粒子射束设备。公开了通过减少多射束设备中的二次带电粒子检测器的检测元件之间的串扰，来增强成像分辨率的系统和方法。多射束设备包括用于将来自样品的多个二次带电粒子射束...

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