ASML 高管：已携手蔡司启动 5nm 分辨率 Hyper NA 光刻机开发

市场资讯2025-06-27

炒股就看金麒麟分析师研报，权威，专业，及时，全面，助您挖掘潜力主题机会！ IT之家 6 月 27 日消息，ASML 技术高级副总裁 Jos Benschop 在接受《日经亚洲》采访时表示，该企业已同光学组件独家合作伙伴蔡司一道启动了5nm 分辨率的 Hyper NA 光刻机开发。作为参考，目前的 TWINSCAN EXE:5000 光刻系统采用 High NA (0.55NA) 光学系统，分辨率为...

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