北京北方华创微电子装备有限公司半导体工艺设备专利公布（半导体加工专利快讯）

DoNews2025-06-21

天眼查App显示，2025年6月20日，“半导体工艺设备”正式进入专利公布阶段。申请人为北京北方华创微电子装备有限公司，该项半导体加工专利涉及半导体工艺设备的技术改进。据专利信息显示，该技术能够显著优化半导体工艺设备中工艺腔室内部温度的均匀性。发明人为王文卓、任亚龙、常江和谭瑞雷。本申请公开了一种半导体工艺设备，属于半导体加工技术领域。所公开的半导体工艺设备包括工艺腔室、保温层、第一排气装置和第二...

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