应用材料以色列公司申请用于光学检查系统的基于镜的中继设备专利，可收集来自物镜的光并中继到成像组件

金融界2025-06-21

金融界2025年6月21日消息，国家知识产权局信息显示，应用材料以色列公司申请一项名为“用于光学检查系统的基于镜的中继设备”的专利，公开号CN120177508A，申请日期为2024年12月。专利摘要显示，一种用于检查掩模或芯片的光学检查系统，该系统包括：物镜，用于收集来自被检查对象的光；中继组件，所述中继组件放置在物镜与成像组件之间的光学路径上，用于收集来自物镜的光，并将所收集的光中继到成像组件...

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