中微半导体设备（上海）股份有限公司用于承载环件的前开式传送盒专利获授权（半导体设备专利快讯）

DoNews2025-06-12

天眼查App显示，2025年6月10日，“用于承载环件的前开式传送盒”正式进入专利权的授权阶段。申请人为中微半导体设备（上海）股份有限公司，该项半导体设备专利涉及环件传送装置的技术改进。据专利信息显示，该技术能够显著优化环件在传送盒中的定位精度，有效解决偏移问题。发明人为陈琦、吴红星、陈伟杰。 “本实用新型提供一种用于承载环件的前开式传送盒，包括：壳体，其具有前开口及容纳腔；用于承载多个环件的第一...

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