重大突破！前ASML专家推进中国EUV光源打破西方垄断

半导体数据2025-05-01

4月29日，中国科学院上海光机所林楠团队在极紫外光刻（EUV）光源领域取得重大突破，成功开发出基于固体激光器的激光等离子体极紫外（LPP-EUV）光源，能量转换效率达3.42%，超越国际顶尖水平，打破西方技术垄断，为中国半导体产业叩开7纳米以下先进制程大门。EUV技术：高端芯片制造的“金钥匙”芯片是现代科技核心，EUV光刻技术是制造高端芯片的关键。其原理是利用13.5nm极紫外光，通过光刻系统将掩...

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{"i18n":{"language":"zh_CN"},"isChannel":false,"data":{"share":"https://www.laohu8.com/m/news/2532882887?lang=zh_CN&edition=full","thumbnail":"","is_english":false,"pubTime":"2025-05-01 23:35","share_image_url":"https://static.laohu8.com/9a95c1376e76363c1401fee7d3717173","id":"2532882887","market":"us","top_or_hot":-1,"title":"重大突破！前ASML专家推进中国EUV光源打破西方垄断","media":"半导体数据","content":"<div>\n<p>4月29日，中国科学院上海光机所林楠团队在极紫外光刻（EUV）光源领域取得重大突破，成功开发出基于固体激光器的激光等离子体极紫外（LPP-EUV）光源，能量转换效率达3.42%，超越国际顶尖水平，打破西方技术垄断，为中国半导体产业叩开7纳米以下先进制程大门。EUV技术：高端芯片制造的“金钥匙”芯片是现代科技核心，EUV光刻技术是制造高端芯片的关键。其原理是利用13.5nm极紫外光，通过光刻系统将掩...</p>\n\n<a href=\"http://gu.qq.com/resources/shy/news/detail-v2/index.html#/?id=nesSN20250502030816a6d05045&s=b\">网页链接</a>\n\n</div>\n","source":"tencent","html":"<!DOCTYPE html>\n<html>\n<head>\n<meta http-equiv=\"Content-Type\" content=\"text/html; charset=utf-8\" />\n<meta name=\"viewport\" content=\"width=device-width,initial-scale=1.0,minimum-scale=1.0,maximum-scale=1.0,user-scalable=no\"/>\n<meta name=\"format-detection\" content=\"telephone=no,email=no,address=no\" />\n<title>重大突破！前ASML专家推进中国EUV光源打破西方垄断</title>\n<style type=\"text/css\">\na,abbr,acronym,address,applet,article,aside,audio,b,big,blockquote,body,canvas,caption,center,cite,code,dd,del,details,dfn,div,dl,dt,\nem,embed,fieldset,figcaption,figure,footer,form,h1,h2,h3,h4,h5,h6,header,hgroup,html,i,iframe,img,ins,kbd,label,legend,li,mark,menu,nav,\nobject,ol,output,p,pre,q,ruby,s,samp,section,small,span,strike,strong,sub,summary,sup,table,tbody,td,tfoot,th,thead,time,tr,tt,u,ul,var,video{ font:inherit;margin:0;padding:0;vertical-align:baseline;border:0 }\nbody{ font-size:16px; line-height:1.5; color:#999; background:transparent; }\n.wrapper{ overflow:hidden;word-break:break-all;padding:10px; }\nh1,h2{ font-weight:normal; line-height:1.35; margin-bottom:.6em; }\nh3,h4,h5,h6{ line-height:1.35; margin-bottom:1em; }\nh1{ font-size:24px; }\nh2{ font-size:20px; }\nh3{ font-size:18px; }\nh4{ font-size:16px; }\nh5{ font-size:14px; }\nh6{ font-size:12px; }\np,ul,ol,blockquote,dl,table{ margin:1.2em 0; }\nul,ol{ margin-left:2em; }\nul{ list-style:disc; }\nol{ list-style:decimal; }\nli,li p{ margin:10px 0;}\nimg{ max-width:100%;display:block;margin:0 auto 1em; }\nblockquote{ color:#B5B2B1; border-left:3px solid #aaa; padding:1em; }\nstrong,b{font-weight:bold;}\nem,i{font-style:italic;}\ntable{ width:100%;border-collapse:collapse;border-spacing:1px;margin:1em 0;font-size:.9em; }\nth,td{ padding:5px;text-align:left;border:1px solid #aaa; }\nth{ font-weight:bold;background:#5d5d5d; }\n.symbol-link{font-weight:bold;}\n/* header{ border-bottom:1px solid #494756; } */\n.title{ margin:0 0 8px;line-height:1.3;color:#ddd; }\n.meta {color:#5e5c6d;font-size:13px;margin:0 0 .5em; }\na{text-decoration:none; color:#2a4b87;}\n.meta .head { display: inline-block; overflow: hidden}\n.head .h-thumb { width: 30px; height: 30px; margin: 0; padding: 0; border-radius: 50%; float: left;}\n.head .h-content { margin: 0; padding: 0 0 0 9px; float: left;}\n.head .h-name {font-size: 13px; color: #eee; margin: 0;}\n.head .h-time {font-size: 11px; color: #7E829C; margin: 0;line-height: 11px;}\n.small {font-size: 12.5px; display: inline-block; transform: scale(0.9); -webkit-transform: scale(0.9); transform-origin: left; -webkit-transform-origin: left;}\n.smaller {font-size: 12.5px; display: inline-block; transform: scale(0.8); -webkit-transform: scale(0.8); transform-origin: left; -webkit-transform-origin: left;}\n.bt-text {font-size: 12px;margin: 1.5em 0 0 0}\n.bt-text p {margin: 0}\n</style>\n</head>\n<body>\n<div class=\"wrapper\">\n<header>\n<h2 class=\"title\">\n重大突破！前ASML专家推进中国EUV光源打破西方垄断\n</h2>\n\n<h4 class=\"meta\">\n\n\n2025-05-01 23:35 北京时间&nbsp;&nbsp;&nbsp;<a href=http://gu.qq.com/resources/shy/news/detail-v2/index.html#/?id=nesSN20250502030816a6d05045&s=b><strong>半导体数据</strong></a>\n\n\n</h4>\n\n</header>\n<article>\n<div>\n<p>4月29日，中国科学院上海光机所林楠团队在极紫外光刻（EUV）光源领域取得重大突破，成功开发出基于固体激光器的激光等离子体极紫外（LPP-EUV）光源，能量转换效率达3.42%，超越国际顶尖水平，打破西方技术垄断，为中国半导体产业叩开7纳米以下先进制程大门。EUV技术：高端芯片制造的“金钥匙”芯片是现代科技核心，EUV光刻技术是制造高端芯片的关键。其原理是利用13.5nm极紫外光，通过光刻系统将掩...</p>\n\n<a href=\"http://gu.qq.com/resources/shy/news/detail-v2/index.html#/?id=nesSN20250502030816a6d05045&s=b\">网页链接</a>\n\n</div>\n\n\n</article>\n</div>\n</body>\n</html>\n","isBrief":false,"type":0,"news_type":1,"symbol":"LU0345774391.USD","symbol_name":"NINETY ONE GSF AMERICAN FRANCHISE \"A\" (USD) ACC","start_time":0,"source_url":"http://gu.qq.com/resources/shy/news/detail-v2/index.html#/?id=nesSN20250502030816a6d05045&s=b","article_id":"2532882887","we_media_id":null,"thumbnails":[],"rights":{"source":"tencent","url":"http://gu.qq.com/resources/shy/news/detail-v2/index.html#/?id=nesSN20250502030816a6d05045&s=b","rn_cache_url":null,"customStyle":"body{padding-top:10px;}#news_title{font-weight:bold;#titleStyle#;}#news_description span{font-size:12px;#descriptionStyle#;}.footer-note{#statement#}","selectors":".mod-LoadTzbdNews, body","filters":".relate-stock, .hot-list, .recom-box, .wx-sou","directOrigin":true},"url":"https://stock-news.laohu8.com/highlight/detail?id=2532882887","pubTimestamp":1746113740,"columns":[],"sourceInfo":{"source_id":"tencent","name":"腾讯"},"weMediaInfo":null,"summary":"4月29日，中国科学院上海光机所林楠团队在极紫外光刻光源领域取得重大突破，成功开发出基于固体激光器的激光等离子体极紫外光源，能量转换效率达3.42%，超越国际顶尖水平，打破西方技术垄断，为中国半导体产业叩开7纳米以下先进制程大门。长期以来，EUV技术被国外垄断，荷兰ASML公司是全球唯一能生产商用EUV光刻机的企业。2019年美国实施出口管制后，ASML禁止向中国出售先进EUV光刻设备，制约中国高端芯片自主生产。","collect":0,"end_time":0,"defaultTopTitle":"qq.com","property":[],"viewcount":null,"language":"zh","relate_stocks":{"LU0345774391.USD":"NINETY ONE GSF AMERICAN FRANCHISE \"A\" (USD) ACC","BK4543":"AI","LU0823434740.USD":"BNP PARIBAS US GROWTH \"C\" (USD) INC","IE0004445239.USD":"JANUS HENDERSON US FORTY \"A2\" (USD) ACC","ASML":"阿斯麦","LU1734074674.USD":"NINETY ONE GSF ASIA PACIFIC FRANCHISE \"A\"(USD) ACC","IE00BD6J9T35.USD":"NEUBERGER BERMAN NEXT GENERATION MOBILITY \"A\" (USD) ACC","BK4588":"碎股","BK4585":"ETF&股票定投概念","03165":"华夏欧优股对冲","LU0345774631.USD":"NINETY ONE GSF AMERICAN FRANCHISE \"A\" (USD) INC","LU0823434583.USD":"BNP PARIBAS US GROWTH \"C\" (USD) ACC","BK4147":"半导体设备","LU0097036916.USD":"贝莱德美国增长A2 USD","LU2063271972.USD":"富兰克林创新领域基金"},"translate_title":"Major breakthrough! Former ASML expert promotes China's EUV light source to break Western monopoly","themeId":null,"isJumpTheme":false,"ttsUrl":null,"symbols_score_info":{"03165":0.6,"ASML":1},"content_text":"4月29日，中国科学院上海光机所林楠团队在极紫外光刻（EUV）光源领域取得重大突破，成功开发出基于固体激光器的激光等离子体极紫外（LPP-EUV）光源，能量转换效率达3.42%，超越国际顶尖水平，打破西方技术垄断，为中国半导体产业叩开7纳米以下先进制程大门。EUV技术：高端芯片制造的“金钥匙”芯片是现代科技核心，EUV光刻技术是制造高端芯片的关键。其原理是利用13.5nm极紫外光，通过光刻系统将掩模版电路图案精确投影到硅片上。长期以来，EUV技术被国外垄断，荷兰ASML公司是全球唯一能生产商用EUV光刻机的企业。2019年美国实施出口管制后，ASML禁止向中国出售先进EUV光刻设备，制约中国高端芯片自主生产。ASML技术路径与林楠团队创新ASML技术路径：光源系统采用激光轰击液态锡靶技术，效率仅0.02%；光学系统使用蔡司制造的多层镀膜反射镜，表面粗糙度0.1纳米以内，反射率70%；精密制造层面，套刻精度达1.1纳米，支持5纳米以下制程。林楠团队技术路线：采用固体脉冲激光器代替二氧化碳激光作为驱动光源，通过优化激光峰值功率密度、改进激光脉冲控制算法和筛选靶材材料，实现光源能量转换效率重大突破。3.42%的效率超越国际顶尖水平，达到商用光源转化效率的一半。固体激光器体积小、电光转换效率高（目前可达千瓦级输出，未来有望达万瓦级），理论最大效率接近6%，有望成为新一代LPP-EUV光刻光源的驱动光源。林楠的科研传奇林楠师从诺贝尔物理学奖得主Anne L’Huillier，在荷兰ASML公司工作期间主导EUV光源研发核心项目。2021年，他放弃国外优厚待遇全职归国，组建先进光刻研究小组，全身心投入EUV光刻技术攻坚。目前，他已申请/授权国际专利110余项，多项专利实现产品转化。“跟跑”到“领跑”：中国半导体产业的机遇与挑战短期影响：提振产业信心，国内企业有望摆脱对国外设备依赖，降低生产成本，提高产品竞争力。长期影响：带动整个半导体产业链协同发展，吸引优秀人才投身产业，形成良好人才培养和创新生态。挑战：尽管在光源上取得突破，但构建完整EUV生态系统仍是巨大挑战。中国在EUV光学元件、光刻胶、对准系统等关键领域仍依赖进口。EUV光学元件：上海光机所离子束抛光技术实现反射镜表面粗糙度低于0.1nm，接近ASML水平，但在镀膜材料和工艺方面仍有差距。EUV光刻胶：国产化率不足1%，日本垄断全球99%市场，国内在高端领域未取得突破，面临配方、原料纯度等难题。对准系统：中国电子科技集团研发的纳米级同步定位技术，同步误差控制在0.5nm以内，达到核心指标，但在整体集成和优化方面仍需努力。分享 / 收藏 / 点赞 / 在看，这次安排下可好~","kind":"news","is_publish_news":true,"is_publish_highlight":false,"is_publish_live":false,"is_publish_wemedia":null,"editions":null,"column":"","sentiment":"1","news_tag":"","news_rank":0,"symbols":[],"gpt_button":0,"need_auth":false,"code":"91000000","status":"200"},"commentList":[],"isCommentEnd":true,"newsSizeData":{"likeSize":0,"commentSize":0,"repostSize":0,"favoriteSize":0,"likeStatus":false,"favoriteStatus":false},"APP":{"userAgent":"Mozilla/5.0 AppleWebKit/537.36 (KHTML, like Gecko; compatible; ClaudeBot/1.0; +claudebot@anthropic.com)","isDev":false,"isTTM":false,"tenantId":"TBCN","deviceId":"web-server-community-laohu8-v3","version":"4.36.2","shortVersion":"4.36.2","platform":"web","vendor":"web","appName":"laohu8","isIOS":false,"isAndroid":false,"isTiger":false,"isTHS":false,"isWeiXin":false,"isWeiXinMini":false,"isWeiBo":false,"isQQ":false,"isBaiduSwan":false,"isBaiduBox":false,"isDingTalk":false,"isToutiao":false,"isOnePlus":false,"isHuaWei":false,"isXiaomi":false,"isXiaomiWebView":false,"isOppo":false,"isVivo":false,"isSamsung":false,"isMobile":false},"href":"/m/news/2532882887","isCrawlerRequest":true}