北方华创申请工艺腔室及半导体工艺设备专利，双重密封提高射频线圈处的密封性

金融界2025-02-22

金融界2025年2月22日消息，国家知识产权局信息显示，北京北方华创微电子装备有限公司申请一项名为“工艺腔室及半导体工艺设备”的专利，公开号 CN 119495543 A，申请日期为2023年8月。专利摘要显示，本发明提供一种工艺腔室，包括：腔体、设置于腔体内的隔离组件和射频线圈，射频线圈用于激发发生腔的气体产生等离子体，射频线圈的两端包括引出段和引入段，引出段和引入段贯穿腔体并伸至腔体外；第一...

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