台积电取得微机电系统专利，实现微机械臂阵列的高效封装

金融界2023-12-06

金融界2023年12月6日消息，据国家知识产权局公告，台湾积体电路制造股份有限公司取得一项名为“微机电系统、微机电系统致动器及微机械臂阵列“，授权公告号CN220131893U，申请日期为2023年5月。专利摘要显示，提供一种微机电系统、微机电系统致动器及微机械臂阵列。该微机械臂阵列包含：在第一水平方向上彼此隔开且沿第二水平方向延伸的多个微机械臂，其中每一微机械臂包含位于每一微机械臂的顶部且在垂直...

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